Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8103976 | Photo mask set for forming multi-layered interconnection lines and semiconductor device fabricated using the same | Sung Jin Kim, Seung-Hyun Chang | 2012-01-24 |
| 7271492 | Photo mask set for forming multi-layered interconnection lines and semiconductor device fabricated using the same | Sung Jin Kim, Seung-Hyun Chang | 2007-09-18 |
| 6402849 | Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device | Gyu-hwan Kwag, Hyun Han | 2002-06-11 |
| 6302962 | Diffusion system having air curtain formation function for manufacturing semiconductor devices and method of controlling the same | Yang-Koo Lee | 2001-10-16 |
| 6099302 | Semiconductor wafer boat with reduced wafer contact area | Ji-Hoon Hong | 2000-08-08 |