Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6742281 | Apparatus for drying semiconductor wafer using vapor dry method | Myung-Hwan Shin, Man-Young Lee | 2004-06-01 |
| 6436809 | Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices made using this method | Gyu-hwan Kwag, Se-Jong Ko, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more | 2002-08-20 |
| 6232239 | Method for cleaning contact holes in a semiconductor device | Kwang-Shin Lim, Eun-Ah Kim, Sang-Oh Park | 2001-05-15 |
| 6232228 | Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the method | Gyu-hwan Kwag, Se-Jong Ko, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more | 2001-05-15 |
| 6200414 | Circulation system for supplying chemical for manufacturing semiconductor devices and circulating method thereof | Gyu-hwan Kwag, Young-hwan Yun | 2001-03-13 |
| 6197150 | Apparatus for wafer treatment for the manufacture of semiconductor devices | Gyu-hwan Kwag | 2001-03-06 |
| 6140233 | Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices thereby | Gyu-hwan Kwag, Se-Jong Ko, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more | 2000-10-31 |
| 5901716 | Wafer cleaning apparatus with rotating cleaning solution injection nozzles | Jun Kyu Lee | 1999-05-11 |