Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7131217 | Apparatus and method for drying semiconductor wafers using IPA vapor drying method | Jung Min Kim, Young-Hee Kim | 2006-11-07 |
| 6742281 | Apparatus for drying semiconductor wafer using vapor dry method | Man-Young Lee, Kyung-Seuk Hwang | 2004-06-01 |