Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8361274 | Etching apparatus and etching method | Kwang-Myung Lee, Ki-Young Yun, Il-Kyoung Kim, Sung-wook Park, Seung-Ki Chae +8 more | 2013-01-29 |
| 7560712 | Ion implanter with etch prevention member(s) | Il-Kyoung Kim, Tae Won Lee, Sung-wook Park, Ki-Young Yun, Won-Soon Lee +2 more | 2009-07-14 |
| 7497963 | Etching method | Kwang-Myung Lee, Ki-Young Yun, Seung-Ki Chae, Wan-Goo Hwang, Jung-Hyun Hwang +3 more | 2009-03-03 |
| 6835276 | Window for allowing end point of etching process to be detected and etching device comprising the same | Jung-Hyun Hwang, Chang-Won Choi, Byeung-Wook Choi, Doo-Won Lee | 2004-12-28 |
| 6114237 | Method of forming contacts for a semiconductor device | — | 2000-09-05 |