Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835276 | Window for allowing end point of etching process to be detected and etching device comprising the same | Jung-Hyun Hwang, No-Hyun Huh, Chang-Won Choi, Doo-Won Lee | 2004-12-28 |
| 6623597 | Focus ring and apparatus for processing a semiconductor wafer comprising the same | Oh-Yeon Han, Guk-Kwang Kim, Yun-Sik Yang | 2003-09-23 |
| 6236903 | Multiple reaction chamber system having wafer recognition system and method for processing wafer using same | Do Hyeong Kim, Tae Ryong Kim, Kwang Jin Jung | 2001-05-22 |