Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833621 | Metal gasket for a semiconductor fabrication chamber | Tae Won Lee, Do-In Bae, Wan-Goo Hwang, Jaung-Joo Kim | 2004-12-21 |
| 6623597 | Focus ring and apparatus for processing a semiconductor wafer comprising the same | Oh-Yeon Han, Yun-Sik Yang, Byeung-Wook Choi | 2003-09-23 |