| 8600150 |
Wafer aligning apparatus and related method |
Heok-Jae Lee, Sang-Ho Kim, Hyu-Rim Park, Kee-Weone Seo, Chang-Woo Woo |
2013-12-03 |
| 8083892 |
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
Young-Min Min, Dae-Kyu Choi, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim |
2011-12-27 |
| 7812320 |
Ion source element, ion implanter having the same and method of modifying the same |
Su-han Yun, Jong-hyun Yang, Seong-gu Kim |
2010-10-12 |
| 7813542 |
Wafer aligning apparatus and related method |
Heok-Jae Lee, Sang-Ho Kim, Hyu-Rim Park, Kee-Weone Seo, Chang-Woo Woo |
2010-10-12 |
| 7578944 |
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
Young-Min Min, Dae-Kyu Choi, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim |
2009-08-25 |
| 7491292 |
Apparatus for catching byproducts in semiconductor device fabrication equipment |
Jung Han, Jin-Jun Park |
2009-02-17 |
| 7193369 |
Method for generating gas plasma |
Young-Min Min, Dae-Kyu Choi, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim |
2007-03-20 |
| 6833621 |
Metal gasket for a semiconductor fabrication chamber |
Tae Won Lee, Guk-Kwang Kim, Wan-Goo Hwang, Jaung-Joo Kim |
2004-12-21 |
| 6787739 |
Apparatus for processing a substrate including a heating apparatus |
Tae Won Lee, Sang Y. Lee |
2004-09-07 |
| 5567542 |
Holder of rechargeable battery cells and retainer thereof for use in an electric vehicle |
— |
1996-10-22 |
