Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8600150 | Wafer aligning apparatus and related method | Heok-Jae Lee, Sang-Ho Kim, Hyu-Rim Park, Kee-Weone Seo, Chang-Woo Woo | 2013-12-03 |
| 8083892 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Young-Min Min, Dae-Kyu Choi, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim | 2011-12-27 |
| 7812320 | Ion source element, ion implanter having the same and method of modifying the same | Su-han Yun, Jong-hyun Yang, Seong-gu Kim | 2010-10-12 |
| 7813542 | Wafer aligning apparatus and related method | Heok-Jae Lee, Sang-Ho Kim, Hyu-Rim Park, Kee-Weone Seo, Chang-Woo Woo | 2010-10-12 |
| 7578944 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Young-Min Min, Dae-Kyu Choi, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim | 2009-08-25 |
| 7491292 | Apparatus for catching byproducts in semiconductor device fabrication equipment | Jung Han, Jin-Jun Park | 2009-02-17 |
| 7193369 | Method for generating gas plasma | Young-Min Min, Dae-Kyu Choi, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim | 2007-03-20 |
| 6833621 | Metal gasket for a semiconductor fabrication chamber | Tae Won Lee, Guk-Kwang Kim, Wan-Goo Hwang, Jaung-Joo Kim | 2004-12-21 |
| 6787739 | Apparatus for processing a substrate including a heating apparatus | Tae Won Lee, Sang Y. Lee | 2004-09-07 |
| 5567542 | Holder of rechargeable battery cells and retainer thereof for use in an electric vehicle | — | 1996-10-22 |