| 8083892 |
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
Dae-Kyu Choi, Do-In Bae, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim |
2011-12-27 |
| 7764483 |
Semiconductor etching apparatus |
Jin-Man Kim, Yun-Sik Yang, Sang-Ho Kim |
2010-07-27 |
| 7578944 |
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
Dae-Kyu Choi, Do-In Bae, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim |
2009-08-25 |
| 7193369 |
Method for generating gas plasma |
Dae-Kyu Choi, Do-In Bae, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim |
2007-03-20 |
| 6824617 |
Input/output valve switching apparatus of semiconductor manufacturing system |
Yun-Sik Yang, Jin-Man Kim, Chang Hyun Jo |
2004-11-30 |
| 6816029 |
RF matching unit |
Dae-Kyu Choi, Sang-Mun Chon, Yun-Sik Yang, Jin-Man Kim |
2004-11-09 |
| 6684652 |
Method of and an apparatus for regulating the temperature of an electrostatic chuck |
Jin-Man Kim, Yun-Sik Yang, Sang-Jun Chun |
2004-02-03 |
| 6202590 |
Plasma apparatus for fabricating semiconductor devices |
Kiw-Sang Kim, In Sung Park |
2001-03-20 |
