Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6684652 | Method of and an apparatus for regulating the temperature of an electrostatic chuck | Jin-Man Kim, Yun-Sik Yang, Young-Min Min | 2004-02-03 |
| 5843237 | Apparatus for manufacturing a semiconductor device having a wafer loading stage with an annular slope | — | 1998-12-01 |