Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7329612 | Semiconductor device and process for producing the same | Yoshimi Shioya, Kazuo Maeda | 2008-02-12 |
| 6815824 | Semiconductor device and method of manufacturing the same | Yoshimi Shioya, Kazuo Maeda, Tomomi Suzuki, Hiroshi Ikakura | 2004-11-09 |
| 6780790 | Semiconductor device and method of manufacturing the same | Yoshimi Shioya, Tomomi Suzuki, Kazuo Maeda | 2004-08-24 |
| 6713383 | Semiconductor device manufacturing method | Yoshimi Shioya, Tomomi Suzuki, Shoji Ohgawara, Kazuo Maeda | 2004-03-30 |
| 6649495 | Manufacturing method of semiconductor device | Yoshimi Shioya, Tomomi Suzuki, Hiroshi Ikakura, Kazuo Maeda | 2003-11-18 |
| 6352943 | Method of film formation and method for manufacturing semiconductor device | Kazuo Maeda | 2002-03-05 |
| 6225236 | Method for reforming undercoating surface and method for production of semiconductor device | Setsu Suzuki | 2001-05-01 |
| 5858100 | Substrate holder and reaction apparatus | Kazuo Maeda, Kouichi Ohira | 1999-01-12 |
| 5620523 | Apparatus for forming film | Kazuo Maeda, Kouichi Ohira | 1997-04-15 |
| 5314538 | Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device | Kazuo Maeda, Noboru Tokumasu | 1994-05-24 |