Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900144 | Film-forming surface reforming method and semiconductor device manufacturing method | Kazuo Maeda, Takayoshi Azumi, Kiyotaka Sasaki | 2005-05-31 |
| 6548426 | Method for improving a quality of dielectric layer and semiconductor device | Kazuo Maeda | 2003-04-15 |
| 6225236 | Method for reforming undercoating surface and method for production of semiconductor device | Yuhko Nishimoto | 2001-05-01 |
| 6133162 | Method of forming a film by using plasmanized process gas containing gaseous H.sub.2 O and an auxiliary gas in a semiconductor device | Junichi Aoki, Kazuo Maeda | 2000-10-17 |
| 6124210 | Method of cleaning surface of substrate and method of manufacturing semiconductor device | Hiroshi Chino, Hideya Matsumoto, Shoji Ohgawara | 2000-09-26 |
| 5834730 | Plasma processing equipment and gas discharging device | Noboru Tokumasu, Kazuo Maeda, Junichi Aoki | 1998-11-10 |