| 6911405 |
Semiconductor device and method of manufacturing the same |
Yoshimi Shioya, Kouichi Ohira, Kazuo Maeda, Tomomi Suzuki, Youichi Yamamoto +2 more |
2005-06-28 |
| 6852651 |
Semiconductor device and method of manufacturing the same |
Yoshimi Shioya, Tomomi Suzuki, Hiroshi Ikakura, Kazuo Maeda |
2005-02-08 |
| 6645883 |
Film forming method, semiconductor device and manufacturing method of the same |
Youichi Yamamoto, Hiroshi Ikakura, Tomomi Suzuki, Yoshimi Shioya, Kouichi Ohira +2 more |
2003-11-11 |
| 6642157 |
Film forming method and semiconductor device |
Yoshimi Shioya, Youichi Yamamoto, Tomomi Suzuki, Hiroshi Ikakura, Shoji Ohgawara +2 more |
2003-11-04 |
| 6479409 |
Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent |
Yoshimi Shioya, Kouichi Ohira, Kazuo Maeda, Tomomi Suzuki, Hiroshi Ikakura +3 more |
2002-11-12 |
