Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899785 | Method of stabilizing oxide etch and chamber performance using seasoning | Kellie L. Dutra, Ronald G. Meunier, Jason William Silbergleit | 2005-05-31 |
| 6818992 | Self-aligned copper silicide formation for improved adhesion/electromigration | Douglas S. Armbrust, Laura Serianni, Eric J. White | 2004-11-16 |
| 6780720 | Method for fabricating a nitrided silicon-oxide gate dielectric | Jay Burnham, Anthony I. Chou, Toshiharu Furukawa, James S. Nakos, Steven M. Shank | 2004-08-24 |
| 6368867 | Monitor for verification of ozone reaction | John J. Lajza, Jr., Harold G. Linde | 2002-04-09 |
| 6251775 | Self-aligned copper silicide formation for improved adhesion/electromigration | Douglas S. Armbrust, Laura Serianni, Eric J. White | 2001-06-26 |