Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8709887 | Method for fabricating a nitrided silicon-oxide gate dielectric | Jay Burnham, James S. Nakos, Bernie Roque, Steven M. Shank, Beth Ward | 2014-04-29 |
| 7759260 | Selective nitridation of gate oxides | Jay Burnham, John J. Ellis-Monaghan, James S. Nakos | 2010-07-20 |
| 7714366 | CMOS transistor with a polysilicon gate electrode having varying grain size | Arne Ballantine, Kevin K. Chan, Jeffrey D. Gilbert, Kevin M. Houlihan, Glen L. Miles +3 more | 2010-05-11 |
| 7291568 | Method for fabricating a nitrided silicon-oxide gate dielectric | Jay Burnham, James S. Nakos, Bernie Roque, Steven M. Shank, Beth Ward | 2007-11-06 |
| 7138691 | Selective nitridation of gate oxides | Jay Burnham, John J. Ellis-Monaghan, James S. Nakos | 2006-11-21 |
| 7109559 | Nitrided ultra thin gate dielectrics | Mukesh V. Khare, Christopher P. D'Emic, Thomas T. Hwang, Paul C. Jamison, Beth Ward | 2006-09-19 |
| 6967167 | Silicon dioxide removing method | Peter J. Geiss, Alvin J. Joseph, Xuefeng Liu, James S. Nakos | 2005-11-22 |
| 6909157 | Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors | Jay Burnham, James S. Nakos, Steven M. Shank, Deborah A. Tucker, Beth Ward | 2005-06-21 |
| 6893948 | Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size | Arne Ballantine, Kevin K. Chan, Jeffrey D. Gilbert, Kevin M. Houlihan, Glen L. Miles +3 more | 2005-05-17 |
| 6893979 | Method for improved plasma nitridation of ultra thin gate dielectrics | Mukesh V. Khare, Christopher P. D'Emic, Thomas T. Hwang, Paul C. Jamison, Beth Ward | 2005-05-17 |
| 6706644 | Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors | Jay Burnham, James S. Nakos, Steven M. Shank, Deborah A. Tucker, Beth Ward | 2004-03-16 |
| 6670263 | Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size | Arne Ballantine, Kevin K. Chan, Jeffrey D. Gilbert, Kevin M. Houlihan, Glen L. Miles +3 more | 2003-12-30 |
| 6417070 | Method for forming a liner in a trench | Arne Ballantine, Jeffrey S. Brown, Jeffrey D. Gilbert, James A. Slinkman, Anthony C. Speranza | 2002-07-09 |