Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685370 | Titanium tungsten liner used with copper interconnects | Cathryn J. Christiansen, Jeffrey P. Gambino, Tom C. Lee, William J. Murphy, Anthony K. Stamper | 2017-06-20 |
| 9196519 | Achieving uniform capacitance between an electrostatic chuck and a semiconductor wafer | Shawn A. Adderly, Jeffrey P. Gambino, William J. Murphy | 2015-11-24 |
| 8084864 | Electromigration resistant aluminum-based metal interconnect structure | Daniel A. Delibac, Zhong-Xiang He, Tom C. Lee, William J. Murphy, Timothy D. Sullivan +2 more | 2011-12-27 |
| 8003536 | Electromigration resistant aluminum-based metal interconnect structure | Daniel A. Delibac, Zhong-Xiang He, Tom C. Lee, William J. Murphy, Timothy D. Sullivan +2 more | 2011-08-23 |
| 7879716 | Metal seed layer deposition | Steven P. Barkyoumb, Edward C. Cooney, III, Keith E. Downes, Thomas L. McDevitt, William J. Murphy | 2011-02-01 |
| 7649262 | Suppression of localized metal precipitate formation and corresponding metallization depletion in semiconductor processing | Terence B. Hook, Baozhen Li, Thomas L. McDevitt, Christopher A. Ponsolle, Bette B. Reuter +2 more | 2010-01-19 |
| 7572650 | Suppression of localized metal precipitate formation and corresponding metallization depletion in semiconductor processing | Terence B. Hook, Baozhen Li, Thomas L. McDevitt, Christopher A. Ponsolle, Bette B. Reuter +2 more | 2009-08-11 |
| 7235487 | Metal seed layer deposition | Steven P. Barkyoumb, Edward C. Cooney, III, Keith E. Downes, Thomas L. McDevitt, William J. Murphy | 2007-06-26 |
| 7173338 | Suppression of localized metal precipitate formation and corresponding metallization depletion in semiconductor processing | Terence B. Hook, Baozhen Li, Thomas L. McDevitt, Christopher A. Ponsolle, Bette B. Reuter +2 more | 2007-02-06 |
| 6762121 | Method of forming refractory metal contact in an opening, and resulting structure | Randy W. Mann, William J. Murphy, Jed H. Rankin, Daniel S. Vanslette | 2004-07-13 |
| 6498096 | Borderless contact to diffusion with respect to gate conductor and methods for fabricating | James Allan Bruce, Charles W. Koburger, III, Michael Lercel, Randy W. Mann, James S. Nakos +3 more | 2002-12-24 |
| 6426558 | Metallurgy for semiconductor devices | Paul M. Feeney, Robert M. Geffken, David V. Horak, Mark P. Murray, Anthony K. Stamper | 2002-07-30 |
| 6215190 | Borderless contact to diffusion with respect to gate conductor and methods for fabricating | James A. Bruce, Charles W. Koburger, III, Michael Lercel, Randy W. Mann, James S. Nakos +3 more | 2001-04-10 |
| 5665608 | Method of aluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical control | Richard A. Conti, James A. O'Neill, Narayana V. Sarma, Donald L. Wilson, Justin W. Wong | 1997-09-09 |
| 5648113 | Aluminum oxide LPCVD system | Steven G. Barbee, Richard A. Conti, Richard Hsiao, James A. O'Neill, Narayana V. Sarma +3 more | 1997-07-15 |
| 5612255 | One dimensional silicon quantum wire devices and the method of manufacture thereof | Seshadri Subbanna, Manu J. Tejwani | 1997-03-18 |
| 5603988 | Method for depositing a titanium or tantalum nitride or nitride silicide | Michael J. Shapiro, Ravi Kanjolia, Ben C. Hui, Paul F. Seidler, Karen L. Holloway +1 more | 1997-02-18 |
| 5540777 | Aluminum oxide LPCVD system | Steven G. Barbee, Richard A. Conti, Richard Hsiao, James A. O'Neill, Narayana V. Sarma +3 more | 1996-07-30 |
| 5534066 | Fluid delivery apparatus having an infrared feedline sensor | James A. O'Neill, Michael L. Passow, Tina J. Cotler, Richard A. Conti, Jyothi Singh | 1996-07-09 |
| 5505816 | Etching of silicon dioxide selectively to silicon nitride and polysilicon | Michael Barnes, John H. Keller, William M. Holber, Tina J. Cotler, Dragan Podlesnik | 1996-04-09 |
| 5492718 | Fluid delivery apparatus and method having an infrared feedline sensor | James A. O'Neill, Michael L. Passow, Tina J. Cotler, Richard A. Conti, Jyothi Singh | 1996-02-20 |
| 5465859 | Dual phase and hybrid phase shifting mask fabrication using a surface etch monitoring technique | Louis L. Hsu, Paul J. Tsang, Chi-Min Yuan | 1995-11-14 |
| 5431734 | Aluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical control | Richard A. Conti, James A. O'Neill, Narayana V. Sarma, Donald L. Wilson, Justin W. Wong | 1995-07-11 |
| 5383088 | Storage capacitor with a conducting oxide electrode for metal-oxide dielectrics | Richard A. Conti, Jeffrey P. Gambino | 1995-01-17 |
| 5354707 | Method of making semiconductor quantum dot light emitting/detecting devices | Seshadri Subbanna, Manu J. Tejwani | 1994-10-11 |