Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11714357 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2023-08-01 |
| 11086229 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2021-08-10 |
| 7816069 | Graded spin-on organic antireflective coating for photolithography | Colin J. Brodsky, Sean D. Burns, Dario L. Goldfarb, David R. Medeiros, Dirk Pfeiffer +3 more | 2010-10-19 |
| 7588879 | Graded spin-on organic antireflective coating for photolithography | Colin J. Brodsky, Sean D. Burns, Dario L. Goldfarb, David R. Medeiros, Dirk Pfeiffer +3 more | 2009-09-15 |
| 7351348 | Evaporation control using coating | Daniel A. Corliss, Dario L. Goldfarb, Steven J. Holmes, Kurt R. Kimmel | 2008-04-01 |
| 7110195 | Monolithic hard pellicle | Emily Gallagher, Rogert K. Leidy, Kenneth Racette, Andrew J. Watts | 2006-09-19 |
| 7067220 | Pattern compensation techniques for charged particle lithographic masks | David Walker | 2006-06-27 |
| 6806006 | Integrated cooling substrate for extreme ultraviolet reticle | Dhirendra Prasad Mathur | 2004-10-19 |
| 6635389 | Method of defining and forming membrane regions in a substrate for stencil or membrane marks | — | 2003-10-21 |
| 6610446 | Information storage on masks for microlithographic tools | — | 2003-08-26 |
| 6555297 | Etch stop barrier for stencil mask fabrication | — | 2003-04-29 |
| 6528215 | Substrate for diamond stencil mask and method for forming | — | 2003-03-04 |
| 6498096 | Borderless contact to diffusion with respect to gate conductor and methods for fabricating | James Allan Bruce, Jonathan D. Chapple-Sokol, Charles W. Koburger, III, Randy W. Mann, James S. Nakos +3 more | 2002-12-24 |
| 6461797 | Method and apparatus for selectively programming a semiconductor device | Jed H. Rankin | 2002-10-08 |
| 6261726 | Projection electron-beam lithography masks using advanced materials and membrane size | Cameron Brooks, Lynn A. Powers | 2001-07-17 |
| 6215190 | Borderless contact to diffusion with respect to gate conductor and methods for fabricating | James A. Bruce, Jonathan D. Chapple-Sokol, Charles W. Koburger, III, Randy W. Mann, James S. Nakos +3 more | 2001-04-10 |