| 11462512 |
Three-dimensional microelectronic package with embedded cooling channels |
Kamal K. Sikka, Fee Li Lie, Kevin R. Winstel, Ravi K. Bonam, Iqbal Rashid Saraf +2 more |
2022-10-04 |
$9,590,000 |
| 11288429 |
Electrical mask validation |
Derren N. Dunn, Michael A. Guillorn, Shawn P. Fetterolf |
2022-03-29 |
$6,469,000 |
| 11177130 |
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography |
Ekmini Anuja De Silva, Dario L. Goldfarb, Nelson Felix, Rudy J. Wojtecki |
2021-11-16 |
$1,912,000 |
| 11056418 |
Semiconductor microcooler |
Donald F. Canaperi, Dario L. Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka |
2021-07-06 |
$5,313,000 |
| 11049789 |
Semiconductor microcooler |
Donald F. Canaperi, Dario L. Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka |
2021-06-29 |
$5,149,000 |
| 11037786 |
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography |
Ekmini Anuja De Silva, Dario L. Goldfarb, Nelson Felix, Rudy J. Wojtecki |
2021-06-15 |
$4,393,000 |
| 10937764 |
Three-dimensional microelectronic package with embedded cooling channels |
Kamal K. Sikka, Fee Li Lie, Kevin R. Winstel, Ravi K. Bonam, Iqbal Rashid Saraf +2 more |
2021-03-02 |
$2,720,000 |
| 10921716 |
Lithographic dose characterization |
Christopher F. Robinson |
2021-02-16 |
$7,591,000 |
| 10921715 |
Semiconductor structure for optical validation |
Derren N. Dunn, Michael A. Guillorn, Shawn P. Fetterolf |
2021-02-16 |
$7,591,000 |
| 10650111 |
Electrical mask validation |
Derren N. Dunn, Michael A. Guillorn, Shawn P. Fetterolf |
2020-05-12 |
$2,725,000 |
| 10642161 |
Baseline overlay control with residual noise reduction |
Scott D. Halle, Richard C. Johnson, Christopher F. Robinson, Chumeng Zheng |
2020-05-05 |
$3,712,000 |
| 10553522 |
Semiconductor microcooler |
Donald F. Canaperi, Dario L. Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka |
2020-02-04 |
$2,135,000 |
| 10553516 |
Semiconductor microcooler |
Donald F. Canaperi, Dario L. Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka |
2020-02-04 |
$2,135,000 |
| 10490481 |
Copper microcooler structure and fabrication |
Fee Li Lie, Kamal K. Sikka, Donald F. Canaperi, Dinesh Gupta, Dario L. Goldfarb |
2019-11-26 |
$3,625,000 |
| 10490480 |
Copper microcooler structure and fabrication |
Fee Li Lie, Kamal K. Sikka, Donald F. Canaperi, Dinesh Gupta, Dario L. Goldfarb |
2019-11-26 |
$3,625,000 |
| 10429743 |
Optical mask validation |
Derren N. Dunn, Michael A. Guillorn, Shawn P. Fetterolf |
2019-10-01 |
$3,685,000 |
| 10347486 |
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography |
Ekmini Anuja De Silva, Dario L. Goldfarb, Nelson Felix, Rudy J. Wojtecki |
2019-07-09 |
$2,201,000 |
| 10281826 |
Determination of lithography effective dose uniformity |
Luciana Meli Thompson, Christopher F. Robinson |
2019-05-07 |
$2,760,000 |
| 10274836 |
Determination of lithography effective dose uniformity |
Luciana Meli Thompson, Christopher F. Robinson |
2019-04-30 |
$3,198,000 |
| 9709898 |
Amplification method for photoresist exposure in semiconductor chip manufacturing |
Richard S. Wise |
2017-07-18 |
$2,009,000 |
| 9451684 |
Dual pulse driven extreme ultraviolet (EUV) radiation source method |
Sadanand V. Deshpande, Veeresh V. Deshpande, Oleg Gluschenkov, Sivarama Krishnan |
2016-09-20 |
$4,565,000 |
| 9301381 |
Dual pulse driven extreme ultraviolet (EUV) radiation source utilizing a droplet comprising a metal core with dual concentric shells of buffer gas |
Sadanand V. Deshpande, Veeresh V. Deshpande, Oleg Gluschenkov, Sivarama Krishnan |
2016-03-29 |
$2,226,000 |
| 9104113 |
Amplification method for photoresist exposure in semiconductor chip manufacturing |
Richard Wise |
2015-08-11 |
$2,160,000 |
| 8350235 |
Semiconductor intra-field dose correction |
Hyung-Rae Lee, Dong-Hee Yu, Sohan S. Mehta, Niall Shepherd |
2013-01-08 |
|
| 7807335 |
Immersion lithography contamination gettering layer |
Dario Gil, Dario L. Goldfarb, Steven J. Holmes, David V. Horak, Kurt R. Kimmel +2 more |
2010-10-05 |
$4,341,000 |
