Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11543793 | Developer critical dimension control with pulse development | Hao Tang, Yongan Xu | 2023-01-03 |
| 10915085 | Developer critical dimension control with pulse development | Hao Tang, Yongan Xu | 2021-02-09 |
| 10642161 | Baseline overlay control with residual noise reduction | Daniel A. Corliss, Scott D. Halle, Christopher F. Robinson, Chumeng Zheng | 2020-05-05 |
| 4224579 | Metal vapor laser discharge tube | Calvin J. Marlett, Edwin A. Reed, William F. Hug | 1980-09-23 |