Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11568101 | Predictive multi-stage modelling for complex process control | Scott D. Halle, Kyong Min Yeo, Robin Hsin Kuo Chao | 2023-01-31 |
| 11288429 | Electrical mask validation | Daniel A. Corliss, Michael A. Guillorn, Shawn P. Fetterolf | 2022-03-29 |
| 10990747 | Automatic generation of via patterns with coordinate-based recurrent neural network (RNN) | Jing Sha, Michael A. Guillorn | 2021-04-27 |
| 10921715 | Semiconductor structure for optical validation | Daniel A. Corliss, Michael A. Guillorn, Shawn P. Fetterolf | 2021-02-16 |
| 10768532 | Co-optimization of lithographic and etching processes with complementary post exposure bake by laser annealing | Jing Sha, Ekmini Anuja De Silva, Nelson Felix | 2020-09-08 |
| 10725454 | Mask process aware calibration using mask pattern fidelity inspections | Ravi K. Bonam, Nicole Saulnier, Michael M. Crouse | 2020-07-28 |
| 10706200 | Generative adversarial networks for generating physical design layout patterns of integrated multi-layers | Jing Sha, Michael A. Guillorn, Martin Burkhardt | 2020-07-07 |
| 10699055 | Generative adversarial networks for generating physical design layout patterns | Jing Sha, Michael A. Guillorn, Martin Burkhardt | 2020-06-30 |
| 10678971 | Space exploration with Bayesian inference | Jing Sha, Dongbing Shao | 2020-06-09 |
| 10657420 | Modeling post-lithography stochastic critical dimension variation with multi-task neural networks | Jing Sha, Ekmini Anuja De Silva | 2020-05-19 |
| 10650111 | Electrical mask validation | Daniel A. Corliss, Michael A. Guillorn, Shawn P. Fetterolf | 2020-05-12 |
| 10621301 | Coordinates-based variational autoencoder for generating synthetic via layout patterns | Jing Sha, Michael A. Guillorn | 2020-04-14 |
| 10606975 | Coordinates-based generative adversarial networks for generating synthetic physical design layout patterns | Jing Sha, Michael A. Guillorn | 2020-03-31 |
| 10599807 | Automatic generation of via patterns with coordinate-based recurrent neural network (RNN) | Jing Sha, Michael A. Guillorn | 2020-03-24 |
| 10592635 | Generating synthetic layout patterns by feedforward neural network based variational autoencoders | Jing Sha, Michael A. Guillorn | 2020-03-17 |
| 10579764 | Co-modeling post-lithography critical dimensions and post-etch critical dimensions with multi-task neural networks | Jing Sha, Ekmini Anuja De Silva | 2020-03-03 |
| 10429743 | Optical mask validation | Daniel A. Corliss, Michael A. Guillorn, Shawn P. Fetterolf | 2019-10-01 |
| 9087739 | Pattern improvement in multiprocess patterning | Ioana Graur, Scott M. Mansfield | 2015-07-21 |
| 9034562 | Pattern improvement in multiprocess patterning | Ioana Graur, Scott M. Mansfield | 2015-05-19 |
| 7975246 | MEEF reduction by elongation of square shapes | Michael M. Crouse, Henning Haffner, Michael E. Scaman | 2011-07-05 |
| 7402532 | Structure to improve adhesion between top CVD low-k dielectric and dielectric capping layer | Lawrence A. Clevenger, Stefanie Chiras, Timothy J. Dalton, James J. Demarest, Chester T. Dziobkowski +7 more | 2008-07-22 |
| 7211507 | PE-ALD of TaN diffusion barrier region on low-k materials | Hyungjun Kim, Stephen M. Rossnagel, Soon-Cheon Seo | 2007-05-01 |
| 7102232 | Structure to improve adhesion between top CVD low-k dielectric and dielectric capping layer | Lawrence A. Clevenger, Stefanie Chiras, Timothy J. Dalton, James J. Demarest, Chester T. Dziobkowski +7 more | 2006-09-05 |