Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10725454 | Mask process aware calibration using mask pattern fidelity inspections | Ravi K. Bonam, Nicole Saulnier, Derren N. Dunn | 2020-07-28 |
| 9940427 | Lens heating aware source mask optimization for advanced lithography | Youri Johannes Laurentius Maria Van Dommelen, Peng Liu, Hua-Yu Liu, Aiqin JIANG, Wenjin Huang | 2018-04-10 |
| 7975246 | MEEF reduction by elongation of square shapes | Derren N. Dunn, Henning Haffner, Michael E. Scaman | 2011-07-05 |
| 7892705 | Photomask and method of making thereof | Sean D. Burns, Dario L. Goldfarb | 2011-02-22 |
| 7537870 | Lithography process optimization and system | Yasri Yudhistira | 2009-05-26 |
| 7493186 | Method and algorithm for the control of critical dimensions in a thermal flow process | Colin J. Brodsky, Allen H. Gabor | 2009-02-17 |
| 6869671 | Enabling nanostructured materials via multilayer thin film precursor and applications to biosensors | Albert E. Miller, Juan Jiang, David Thomas Crouse, Subash C. Basu | 2005-03-22 |