Issued Patents All Time
Showing 1–25 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033856 | Litho-litho-etch (LLE) multi color resist | Yann Mignot, Ekmini Anuja De Silva | 2024-07-09 |
| 12019376 | Polymer brush adhesion promoter with UV cleavable linker | Jing Guo, Bharat Kumar, Ekmini Anuja De Silva, Jennifer Church, Nelson Felix | 2024-06-25 |
| 11906901 | Alternating copolymer chain scission photoresists | Ekmini Anuja De Silva, Jing Guo, Jennifer Church, Luciana Meli | 2024-02-20 |
| 11556057 | Surface treatment of titanium containing hardmasks | Ekmini Anuja De Silva, Indira Seshadri | 2023-01-17 |
| 11500290 | Adhesion promoters | Bharat Kumar, Ekmini Anuja De Silva, Jing Guo | 2022-11-15 |
| 11462512 | Three-dimensional microelectronic package with embedded cooling channels | Kamal K. Sikka, Fee Li Lie, Kevin R. Winstel, Ravi K. Bonam, Iqbal Rashid Saraf +2 more | 2022-10-04 |
| 11367617 | Graded hardmask interlayer for enhanced extreme ultraviolet performance | Jennifer Church, Ekmini Anuja De Silva | 2022-06-21 |
| 11307496 | Metal brush layer for EUV patterning | Ekmini Anuja De Silva, Jing Guo, Jennifer Church | 2022-04-19 |
| 11199778 | Polymer brush adhesion promoter with UV cleavable linker | Jing Guo, Bharat Kumar, Ekmini Anuja De Silva, Jennifer Church, Nelson Felix | 2021-12-14 |
| 11177130 | Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography | Ekmini Anuja De Silva, Nelson Felix, Daniel A. Corliss, Rudy J. Wojtecki | 2021-11-16 |
| 11056418 | Semiconductor microcooler | Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2021-07-06 |
| 11049789 | Semiconductor microcooler | Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2021-06-29 |
| 11037786 | Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography | Ekmini Anuja De Silva, Nelson Felix, Daniel A. Corliss, Rudy J. Wojtecki | 2021-06-15 |
| 10998191 | Graded hardmask interlayer for enhanced extreme ultraviolet performance | Jennifer Church, Ekmini Anuja De Silva | 2021-05-04 |
| 10964541 | Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography | Martin Glodde | 2021-03-30 |
| 10937764 | Three-dimensional microelectronic package with embedded cooling channels | Kamal K. Sikka, Fee Li Lie, Kevin R. Winstel, Ravi K. Bonam, Iqbal Rashid Saraf +2 more | 2021-03-02 |
| 10828678 | Drying an extreme ultraviolet (EUV) pellicle | — | 2020-11-10 |
| 10831102 | Photoactive polymer brush materials and EUV patterning using the same | Ekmini Anuja De Silva, Rudy J. Wojtecki, Daniel P. Sanders, Nelson Felix | 2020-11-10 |
| 10748823 | Embedded etch rate reference layer for enhanced etch time precision | Yann Mignot, Alan C. Thomas, Daniel P. Sanders, Nelson Felix, Chi-Chun Liu +1 more | 2020-08-18 |
| 10727055 | Method to increase the lithographic process window of extreme ultra violet negative tone development resists | Nelson Felix, Martin Glodde | 2020-07-28 |
| 10678135 | Surface treatment of titanium containing hardmasks | Ekmini Anuja De Silva, Indira Seshadri | 2020-06-09 |
| 10656523 | Polymer brushes for extreme ultraviolet photolithography | Martin Glodde, Ankit Vora | 2020-05-19 |
| 10569307 | Drying an extreme ultraviolet (EUV) pellicle | — | 2020-02-25 |
| 10553522 | Semiconductor microcooler | Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2020-02-04 |
| 10553516 | Semiconductor microcooler | Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2020-02-04 |