Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8586283 | Near-infrared absorbing film compositions | Martin Glodde, Wu-Song Huang, Wai-Kin Li, Sen Liu, Pushkara R. Varanasi +1 more | 2013-11-19 |
| 8536031 | Method of fabricating dual damascene structures using a multilevel multiple exposure patterning scheme | John C. Arnold, Kuang-Jung Chen, Matthew E. Colburn, Stefan Harrer, Steven J. Holmes +1 more | 2013-09-17 |
| 8435719 | Tunable contact angle process for immersionlithography topcoats and photoresists | — | 2013-05-07 |
| 8395228 | Integration process to improve focus leveling within a lot process variation | Wai-Kin Li, Wu-Song Huang, Martin Glodde, Edward R. Engbrecht, Yiheng Xu | 2013-03-12 |
| 8388758 | Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid | John P. Simons, Kenneth McCullough, Wayne M. Moreau, John M. Cotte, Keith R. Pope +1 more | 2013-03-05 |
| 8373271 | Interconnect structure with an oxygen-doped SiC antireflective coating and method of fabrication | Ranee W. Kwong, Qinghuang Lin, Deborah A. Neumayer, Hosadurga Shobha | 2013-02-12 |
| 8354336 | Forming an electrode having reduced corrosion and water decomposition on surface using an organic protective layer | Ali Afzali-Ardakani, Shafaat Ahmed, Hariklia Deligianni, Stefan Harrer, Binquan Luan +6 more | 2013-01-15 |
| 8293451 | Near-infrared absorbing film compositions | Martin Glodde, Wu-Song Huang, Wai-Kin Li, Sen Liu, Pushkara R. Varanasi +1 more | 2012-10-23 |
| 8137874 | Organic graded spin on BARC compositions for high NA lithography | Libor Vyklicky, Sean D. Burns, David R. Medeiros, Daniel P. Sanders, Robert David Allen | 2012-03-20 |
| 8124485 | Molecular spacer layer for semiconductor oxide surface and high-K dielectric stack | Hemanth Jagannathan, Dirk Pfeiffer | 2012-02-28 |
| 8084193 | Self-segregating multilayer imaging stack with built-in antireflective properties | Joy Cheng, David R. Medeiros, Daniel P. Sanders, Dirk Pfeifer, Libor Vylicky | 2011-12-27 |
| 8017303 | Ultra low post exposure bake photoresist materials | Mahmoud Khojasteh, Pushkara R. Varanasi | 2011-09-13 |
| 7892705 | Photomask and method of making thereof | Sean D. Burns, Michael M. Crouse | 2011-02-22 |
| 7869002 | Reducing contamination in immersion lithography | Dmitriy Shneyder, Raschid J. Bezama, Kafal Lai | 2011-01-11 |
| 7816069 | Graded spin-on organic antireflective coating for photolithography | Colin J. Brodsky, Sean D. Burns, Michael Lercel, David R. Medeiros, Dirk Pfeiffer +3 more | 2010-10-19 |
| 7807335 | Immersion lithography contamination gettering layer | Daniel A. Corliss, Dario Gil, Steven J. Holmes, David V. Horak, Kurt R. Kimmel +2 more | 2010-10-05 |
| 7787101 | Apparatus and method for reducing contamination in immersion lithography | Raschid J. Bezama, Kafai Lai, Xiao Hi Liu, Dmitriy Shneyder | 2010-08-31 |
| 7782445 | Reducing contamination in immersion lithography | Dmitriy Shneyder, Raschid J. Bezama, Kafal Lai | 2010-08-24 |
| 7727708 | Method for fabricating dual damascene structures | Matthew E. Colburn | 2010-06-01 |
| 7588879 | Graded spin-on organic antireflective coating for photolithography | Colin J. Brodsky, Sean D. Burns, Michael Lercel, David R. Medeiros, Dirk Pfeiffer +3 more | 2009-09-15 |
| 7579137 | Method for fabricating dual damascene structures | Matthew E. Colburn | 2009-08-25 |
| 7521172 | Topcoat material and use thereof in immersion lithography processes | Robert Allen David, Phillip Brock, Sean D. Burns, David R. Medeiros, Dirk Pfeiffer +3 more | 2009-04-21 |
| 7446859 | Apparatus and method for reducing contamination in immersion lithography | Dmitriy Shneyder, Raschid J. Bezama, Kafai Lai | 2008-11-04 |
| 7351348 | Evaporation control using coating | Daniel A. Corliss, Steven J. Holmes, Kurt R. Kimmel, Michael Lercel | 2008-04-01 |
| 7332436 | Process of removing residue from a precision surface using liquid or supercritical carbon dioxide composition | John M. Cotte, Pamela Jones, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope +2 more | 2008-02-19 |