| 8828143 |
Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid |
John P. Simons, Kenneth McCullough, John M. Cotte, Keith R. Pope, Charles J. Taft +1 more |
2014-09-09 |
$5,167,000 |
| 8388758 |
Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid |
John P. Simons, Kenneth McCullough, John M. Cotte, Keith R. Pope, Charles J. Taft +1 more |
2013-03-05 |
$6,102,000 |
| 7960095 |
Use of mixed bases to enhance patterned resist profiles on chrome or sensitive substrates |
Marie Angelopoulos, Wu-Song Huang, David R. Medeiros, Karen E. Petrillo |
2011-06-14 |
$3,503,000 |
| 7736833 |
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof |
Marie Angelopoulos, Katherina Babich, Douglas Charles LaTulipe, Qinghuang Lin, David R. Medeiros +2 more |
2010-06-15 |
$4,416,000 |
| 7709177 |
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof |
Marie Angelopoulos, Katherina Babich, Douglas Charles LaTulipe, Qinghuang Lin, David R. Medeiros +2 more |
2010-05-04 |
$4,679,000 |
| 7638266 |
Ultrathin polymeric photoacid generator layer and method of fabricating at least one of a device and a mask by using said layer |
Marie Angelopoulos, Gregory Breyta, Wu-Song Huang, Robert N. Lang, Wenjie Li +2 more |
2009-12-29 |
$22,760,000 |
| 7485964 |
Dielectric material |
John M. Cotte, Kenneth McCullough, Kevin S. Petrarca, John P. Simons, Charles J. Taft +1 more |
2009-02-03 |
$3,057,000 |
| 7361444 |
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof |
Marie Angelopoulos, Katherina Babich, Douglas Charles LaTulipe, Qinghuang Lin, David R. Medeiros +2 more |
2008-04-22 |
$8,943,000 |
| 7332436 |
Process of removing residue from a precision surface using liquid or supercritical carbon dioxide composition |
John M. Cotte, Dario L. Goldfarb, Pamela Jones, Kenneth McCullough, Keith R. Pope +2 more |
2008-02-19 |
$12,555,000 |
| 7314700 |
High sensitivity resist compositions for electron-based lithography |
Wu-Song Huang, Wenjie Li, David R. Medeiros, Karen E. Petrillo, Robert N. Lang +1 more |
2008-01-01 |
|
| 7288155 |
Method for the rapid thermal control of a work piece in liquid or supercritical fluid |
John P. Simons, Kenneth McCullough, John M. Cotte, Keith R. Pope, Charles J. Taft +1 more |
2007-10-30 |
$4,304,000 |
| 7276327 |
Silicon-containing compositions for spin-on arc/hardmask materials |
Marie Angelopoulos, Wu-Song Huang, Arpan P. Mahorowila, Dirk Pfeiffer, Ratnam Sooriyekumaren |
2007-10-02 |
$8,802,000 |
| 7270931 |
Silicon-containing compositions for spin-on ARC/hardmask materials |
Marie Angelopoulos, Wu-Song Huang, Arpan P. Mahorowila, Dirk Pfeiffer, Ratnam Sooriyakumaran |
2007-09-18 |
$6,075,000 |
| 7168224 |
Method of making a packaged radiation sensitive resist film-coated workpiece |
Marie Angelopoulos, Wu-Song Huang, Ranee W. Kwong, David R. Medeiros, Karen E. Petrillo +2 more |
2007-01-30 |
$4,520,000 |
| 7081208 |
Method to build a microfilter |
Kenneth McCullough, Keith R. Pope, Robert J. Purtell, John P. Simons, William A. Syverson +1 more |
2006-07-25 |
$9,389,000 |
| 7056837 |
Process of insulating a semiconductor device using a polymeric material |
John M. Cotte, Kenneth McCullough, Kevin S. Petrarca, John P. Simons, Charles J. Taft +1 more |
2006-06-06 |
$5,053,000 |
| 6997197 |
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid |
John P. Simons, Kenneth McCullough, John M. Cotte, Keith R. Pope, Charles J. Taft +1 more |
2006-02-14 |
$5,958,000 |
| 6953042 |
Apparatus and process for supercritical carbon dioxide phase processing |
Jesse Jur, Kenneth McCullough, John P. Simons, Charles J. Taft |
2005-10-11 |
$11,788,000 |
| 6927393 |
Method of in situ monitoring of supercritical fluid process conditions |
John M. Cotte, Kenneth McCullough, Keith R. Pope, Robert J. Purtell, John P. Simons +1 more |
2005-08-09 |
$5,698,000 |
| 6892741 |
Apparatus and process for supercritical carbon dioxide phase processing |
Jesse Jur, Kenneth McCullough, John P. Simons, Charles J. Taft |
2005-05-17 |
$7,073,000 |
| 6890855 |
Process of removing residue material from a precision surface |
John M. Cotte, Kenneth McCullough, Keith R. Pope, John P. Simons, Charles J. Taft |
2005-05-10 |
$5,425,000 |
| 6875286 |
Solid CO2 cleaning |
John M. Cotte, Catherine Ivers, Kenneth McCullough, Robert J. Purtell, John P. Simons +2 more |
2005-04-05 |
$5,479,000 |
| 6838015 |
Liquid or supercritical carbon dioxide composition |
John M. Cotte, Dario L. Goldfarb, Pamela Jones, Kenneth McCullough, Keith R. Pope +2 more |
2005-01-04 |
$10,543,000 |
| 6834671 |
Check valve for micro electro mechanical structure devices |
John M. Cotte, Kenneth McCullough, John P. Simons, Charles J. Taft, Richard P. Volant |
2004-12-28 |
$11,084,000 |
| 6821488 |
Sample holding chuck for use in reactor and reactor using same |
Kenneth McCullough, John P. Simons, Charles J. Taft |
2004-11-23 |
$4,043,000 |
