Issued Patents All Time
Showing 25 most recent of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8828143 | Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid | John P. Simons, Kenneth McCullough, John M. Cotte, Keith R. Pope, Charles J. Taft +1 more | 2014-09-09 |
| 8388758 | Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid | John P. Simons, Kenneth McCullough, John M. Cotte, Keith R. Pope, Charles J. Taft +1 more | 2013-03-05 |
| 7960095 | Use of mixed bases to enhance patterned resist profiles on chrome or sensitive substrates | Marie Angelopoulos, Wu-Song Huang, David R. Medeiros, Karen E. Petrillo | 2011-06-14 |
| 7736833 | Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof | Marie Angelopoulos, Katherina Babich, Douglas Charles LaTulipe, Qinghuang Lin, David R. Medeiros +2 more | 2010-06-15 |
| 7709177 | Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof | Marie Angelopoulos, Katherina Babich, Douglas Charles LaTulipe, Qinghuang Lin, David R. Medeiros +2 more | 2010-05-04 |
| 7638266 | Ultrathin polymeric photoacid generator layer and method of fabricating at least one of a device and a mask by using said layer | Marie Angelopoulos, Gregory Breyta, Wu-Song Huang, Robert N. Lang, Wenjie Li +2 more | 2009-12-29 |
| 7485964 | Dielectric material | John M. Cotte, Kenneth McCullough, Kevin S. Petrarca, John P. Simons, Charles J. Taft +1 more | 2009-02-03 |
| 7361444 | Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof | Marie Angelopoulos, Katherina Babich, Douglas Charles LaTulipe, Qinghuang Lin, David R. Medeiros +2 more | 2008-04-22 |
| 7332436 | Process of removing residue from a precision surface using liquid or supercritical carbon dioxide composition | John M. Cotte, Dario L. Goldfarb, Pamela Jones, Kenneth McCullough, Keith R. Pope +2 more | 2008-02-19 |
| 7314700 | High sensitivity resist compositions for electron-based lithography | Wu-Song Huang, Wenjie Li, David R. Medeiros, Karen E. Petrillo, Robert N. Lang +1 more | 2008-01-01 |
| 7288155 | Method for the rapid thermal control of a work piece in liquid or supercritical fluid | John P. Simons, Kenneth McCullough, John M. Cotte, Keith R. Pope, Charles J. Taft +1 more | 2007-10-30 |
| 7276327 | Silicon-containing compositions for spin-on arc/hardmask materials | Marie Angelopoulos, Wu-Song Huang, Arpan P. Mahorowila, Dirk Pfeiffer, Ratnam Sooriyekumaren | 2007-10-02 |
| 7270931 | Silicon-containing compositions for spin-on ARC/hardmask materials | Marie Angelopoulos, Wu-Song Huang, Arpan P. Mahorowila, Dirk Pfeiffer, Ratnam Sooriyakumaran | 2007-09-18 |
| 7168224 | Method of making a packaged radiation sensitive resist film-coated workpiece | Marie Angelopoulos, Wu-Song Huang, Ranee W. Kwong, David R. Medeiros, Karen E. Petrillo +2 more | 2007-01-30 |
| 7081208 | Method to build a microfilter | Kenneth McCullough, Keith R. Pope, Robert J. Purtell, John P. Simons, William A. Syverson +1 more | 2006-07-25 |
| 7056837 | Process of insulating a semiconductor device using a polymeric material | John M. Cotte, Kenneth McCullough, Kevin S. Petrarca, John P. Simons, Charles J. Taft +1 more | 2006-06-06 |
| 6997197 | Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid | John P. Simons, Kenneth McCullough, John M. Cotte, Keith R. Pope, Charles J. Taft +1 more | 2006-02-14 |
| 6953042 | Apparatus and process for supercritical carbon dioxide phase processing | Jesse Jur, Kenneth McCullough, John P. Simons, Charles J. Taft | 2005-10-11 |
| 6927393 | Method of in situ monitoring of supercritical fluid process conditions | John M. Cotte, Kenneth McCullough, Keith R. Pope, Robert J. Purtell, John P. Simons +1 more | 2005-08-09 |
| 6892741 | Apparatus and process for supercritical carbon dioxide phase processing | Jesse Jur, Kenneth McCullough, John P. Simons, Charles J. Taft | 2005-05-17 |
| 6890855 | Process of removing residue material from a precision surface | John M. Cotte, Kenneth McCullough, Keith R. Pope, John P. Simons, Charles J. Taft | 2005-05-10 |
| 6875286 | Solid CO2 cleaning | John M. Cotte, Catherine Ivers, Kenneth McCullough, Robert J. Purtell, John P. Simons +2 more | 2005-04-05 |
| 6838015 | Liquid or supercritical carbon dioxide composition | John M. Cotte, Dario L. Goldfarb, Pamela Jones, Kenneth McCullough, Keith R. Pope +2 more | 2005-01-04 |
| 6834671 | Check valve for micro electro mechanical structure devices | John M. Cotte, Kenneth McCullough, John P. Simons, Charles J. Taft, Richard P. Volant | 2004-12-28 |
| 6821488 | Sample holding chuck for use in reactor and reactor using same | Kenneth McCullough, John P. Simons, Charles J. Taft | 2004-11-23 |