Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7276327 | Silicon-containing compositions for spin-on arc/hardmask materials | Marie Angelopoulos, Wu-Song Huang, Wayne M. Moreau, Dirk Pfeiffer, Ratnam Sooriyekumaren | 2007-10-02 |
| 7270931 | Silicon-containing compositions for spin-on ARC/hardmask materials | Marie Angelopoulos, Wu-Song Huang, Wayne M. Moreau, Dirk Pfeiffer, Ratnam Sooriyakumaran | 2007-09-18 |