Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7276327 | Silicon-containing compositions for spin-on arc/hardmask materials | Marie Angelopoulos, Wu-Song Huang, Arpan P. Mahorowila, Wayne M. Moreau, Dirk Pfeiffer | 2007-10-02 |