Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7787101 | Apparatus and method for reducing contamination in immersion lithography | Raschid J. Bezama, Dario L. Goldfarb, Kafai Lai, Dmitriy Shneyder | 2010-08-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7787101 | Apparatus and method for reducing contamination in immersion lithography | Raschid J. Bezama, Dario L. Goldfarb, Kafai Lai, Dmitriy Shneyder | 2010-08-31 |