| 12272545 |
Embedded metal contamination removal from BEOL wafers |
Devika Sil, Ashim Dutta, Yann Mignot, Daniel C. Edelstein, Kedari Matam +1 more |
2025-04-08 |
|
| 12268031 |
Backside power rails and power distribution network for density scaling |
Ruilong Xie, Kisik Choi, Somnath Ghosh, Sagarika Mukesh, Albert M. Chu +6 more |
2025-04-01 |
|
| 12243771 |
Selective patterning of vias with hardmasks |
Ashim Dutta, Dominik Metzler, Timothy Mathew Philip, Sagarika Mukesh |
2025-03-04 |
|
| 12020949 |
Subtractive patterning of interconnect structures |
Dominik Metzler, Somnath Ghosh, Ekmini Anuja De Silva |
2024-06-25 |
$10,690,000 |
| 11830807 |
Placing top vias at line ends by selective growth of via mask from line cut dielectric |
Ashim Dutta, Ekmini Anuja De Silva, Dominik Metzler |
2023-11-28 |
$7,743,000 |
| 11688636 |
Spin on scaffold film for forming topvia |
Somnath Ghosh, Karen E. Petrillo, Cody J. Murray, Ekmini Anuja De Silva, Chi-Chun Liu +1 more |
2023-06-27 |
$4,778,000 |
| 11462583 |
Embedding magneto-resistive random-access memory devices between metal levels |
Ashim Dutta, Chih-Chao Yang, Daniel C. Edelstein, Theodorus E. Standaert |
2022-10-04 |
$9,590,000 |
| 11404317 |
Method for fabricating a semiconductor device including self-aligned top via formation at line ends |
Ashim Dutta, Dominik Metzler, Ekmini Anuja De Silva |
2022-08-02 |
$9,617,000 |
| 11302533 |
Selective gas etching for self-aligned pattern transfer |
Sean D. Burns, Yann Mignot, Yongan Xu |
2022-04-12 |
$10,037,000 |
| 11276607 |
Selective patterning of vias with hardmasks |
Ashim Dutta, Dominik Metzler, Timothy Mathew Philip, Sagarika Mukesh |
2022-03-15 |
$4,817,000 |
| 11239077 |
Litho-etch-litho-etch with self-aligned blocks |
Chi-Chun Liu, Nelson Felix, Yann Mignot, Ekmini Anuja De Silva, Allen H. Gabor |
2022-02-01 |
$4,586,000 |
| 11195995 |
Back-end-of-line compatible processing for forming an array of pillars |
Chi-Chun Liu, Yann Mignot, Ekmini Anuja De Silva, Nelson Felix |
2021-12-07 |
$3,115,000 |
| 11189561 |
Placing top vias at line ends by selective growth of via mask from line cut dielectric |
Ashim Dutta, Ekmini Anuja De Silva, Dominik Metzler |
2021-11-30 |
$2,996,000 |
| 11189783 |
Embedded MRAM device formation with self-aligned dielectric cap |
Dominik Metzler, Ashim Dutta, Donald F. Canaperi |
2021-11-30 |
$2,996,000 |
| 11189527 |
Self-aligned top vias over metal lines formed by a damascene process |
Timothy Mathew Philip, Sagarika Mukesh, Dominik Metzler, Ashim Dutta |
2021-11-30 |
$2,996,000 |
| 11189528 |
Subtractive RIE interconnect |
Balasubramanian S. Pranatharthi Haran, Takeshi Nogami |
2021-11-30 |
$2,996,000 |
| 11171002 |
Alternating hardmasks for tight-pitch line formation |
Anuja E. DeSilva, Nelson Felix, Chi-Chun Liu, Yann Mignot, Stuart A. Sieg |
2021-11-09 |
$17,544,000 |
| 11158786 |
MRAM device formation with controlled ion beam etch of MTJ |
Ashim Dutta, Chih-Chao Yang, Lijuan Zou |
2021-10-26 |
$2,874,000 |
| 11152261 |
Self-aligned top via formation at line ends |
Ashim Dutta, Dominik Metzler |
2021-10-19 |
$2,168,000 |
| 11133260 |
Self-aligned top via |
Chi-Chun Liu, Dominik Metzler, Nelson Felix, Ashim Dutta |
2021-09-28 |
$6,479,000 |
| 10957850 |
Multi-layer encapsulation to enable endpoint-based process control for embedded memory fabrication |
Ashim Dutta, Isabel Cristina Chu, Son V. Nguyen, Michael Rizzolo |
2021-03-23 |
$2,115,000 |
| 10930504 |
Selective gas etching for self-aligned pattern transfer |
Sean D. Burns, Yann Mignot, Yongan Xu |
2021-02-23 |
$13,259,000 |
| 10879068 |
Extreme ultraviolet lithography for high volume manufacture of a semiconductor device |
Yongan Xu, Yann Mignot, Oleg Gluschenkov |
2020-12-29 |
$5,669,000 |
| 10833257 |
Formation of embedded magnetic random-access memory devices with multi-level bottom electrode via contacts |
Ashim Dutta, Chih-Chao Yang, Theodorus E. Standaert |
2020-11-10 |
$848,000 |
| 10833258 |
MRAM device formation with in-situ encapsulation |
Ashim Dutta, Chih-Chao Yang, Daniel C. Edelstein, Karthik Yogendra |
2020-11-10 |
$848,000 |
