Issued Patents All Time
Showing 76–82 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7288155 | Method for the rapid thermal control of a work piece in liquid or supercritical fluid | John P. Simons, Kenneth McCullough, Wayne M. Moreau, John M. Cotte, Keith R. Pope +1 more | 2007-10-30 |
| 7229936 | Method to reduce photoresist pattern collapse by controlled surface microroughening | Colin J. Brodsky, Scott Bukofsky, Scott D. Halle | 2007-06-12 |
| 6997197 | Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid | John P. Simons, Kenneth McCullough, Wayne M. Moreau, John M. Cotte, Keith R. Pope +1 more | 2006-02-14 |
| 6838015 | Liquid or supercritical carbon dioxide composition | John M. Cotte, Pamela Jones, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope +2 more | 2005-01-04 |
| 6509136 | Process of drying a cast polymeric film disposed on a workpiece | Kenneth McCullough, David R. Medeiros, Wayne M. Moreau, John P. Simons, Charles J. Taft | 2003-01-21 |
| 6454869 | Process of cleaning semiconductor processing, handling and manufacturing equipment | John M. Cotte, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons +1 more | 2002-09-24 |
| 6398875 | Process of drying semiconductor wafers using liquid or supercritical carbon dioxide | John M. Cotte, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons +1 more | 2002-06-04 |