Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906901 | Alternating copolymer chain scission photoresists | Dario L. Goldfarb, Ekmini Anuja De Silva, Jing Guo, Jennifer Church | 2024-02-20 |
| 11561481 | Using E0 exposures for track/cluster monitoring | Cody J. Murray, Ekmini Anuja De Silva, Christopher F. Robinson | 2023-01-24 |
| 11194254 | Lithography process delay characterization and effective dose compensation | Christopher F. Robinson, Ekmini Anuja De Silva, Cody J. Murray | 2021-12-07 |
| 10998192 | Sequential infiltration synthesis extreme ultraviolet single expose patterning | Ekmini Anuja De Silva, Jing Guo, Nelson Felix | 2021-05-04 |
| 10707326 | Vertical field-effect-transistors having a silicon oxide layer with controlled thickness | Chi-Chun Liu, Sanjay C. Mehta, Muthumanickam Sankarapandian, Kristin Schmidt, Ankit Vora | 2020-07-07 |
| 10437951 | Care area generation by detection optimized methodology | Ravi K. Bonam, Nelson Felix, Scott D. Halle | 2019-10-08 |
| 10256320 | Vertical field-effect-transistors having a silicon oxide layer with controlled thickness | Chi-Chun Liu, Sanjay C. Mehta, Muthumanickam Sankarapandian, Kristin Schmidt, Ankit Vora | 2019-04-09 |