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Systems and methods of making polymeric optical layers for optical layering |
Marvin Dion Alim, Richard A. Farrell, Matthew E. Colburn, Austin Lane |
2025-11-11 |
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Coating composition and planarization of high refractive index overcoat on gratings |
Keren Zhang |
2025-08-19 |
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Techniques for controlling overburden planarization |
Keren Zhang, Matthew E. Colburn, Feyza Dundar Arisoy, Igor ABRAMSON |
2025-07-01 |
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Hydrophilic and zeta potential tunable chemical mechanical polishing pads |
Sivapackia Ganapathiappan, Boyi Fu, Ashwin CHOCKALINGAM, Daniel Redfield, Rajeev Bajaj +3 more |
2023-11-28 |
$39,424,000 |
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Gray-tone lithography for precise control of grating etch depth |
Elliott Franke, Nihar Mohanty, Austin Lane, Matthew E. Colburn |
2023-07-25 |
$414,086,000 |
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Formulations for advanced polishing pads |
Sivapackia Ganapathiappan, Boyi Fu, Venkat Hariharan, Mayu YAMAMURA, Mario CORNEJO +5 more |
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Inorganic matrix nanoimprint lithographs and methods of making thereof with reduced carbon |
Giuseppe Calafiore, Tingling Rao, Peter Topalian |
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Imageable overcoat for an optical waveguide and process for making the same |
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2021-08-31 |
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Polishing pad with window and manufacturing methods thereof |
Boyi Fu, Sivapackia Ganapathiappan, Daniel Redfield, Rajeev Bajaj, Ashwin CHOCKALINGAM +4 more |
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Variable-etch-depth gratings |
Nihar Mohanty, Austin Lane, Matthew E. Colburn, Elliott Franke |
2021-04-13 |
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Method to create a free-standing membrane for biological applications |
Kenichi Ohno, Philip Allan Kraus, Zohreh Hesabi, Joseph R. Johnson |
2020-11-10 |
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Vertical field-effect-transistors having a silicon oxide layer with controlled thickness |
Chi-Chun Liu, Sanjay C. Mehta, Luciana Meli, Muthumanickam Sankarapandian, Kristin Schmidt |
2020-07-07 |
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Polymer brushes for extreme ultraviolet photolithography |
Martin Glodde, Dario L. Goldfarb |
2020-05-19 |
$2,035,000 |
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Self-aligned patterning methods which implement directed self-assembly |
Sean D. Burns, Sivananda K. Kanakasabapathy, Kafai Lai, Chi-Chun Liu, Kristin Schmidt |
2020-04-07 |
$1,846,000 |
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Composite membrane with multi-layered active layer |
Radwan A. Alrasheed, Blake Davis, Jacquana Diep, Geraud Jean-Michel Dubois, Young-Hye Na +1 more |
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$1,949,000 |
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Polymer brushes for extreme ultraviolet photolithography |
Martin Glodde, Dario L. Goldfarb |
2019-07-09 |
$2,201,000 |
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Block copolymers with surface-active junction groups, compositions and processes thereof |
Eri Hirahara, Joy Cheng, Durairaj BASKARAN, Orest Polishchuk, Melia Tjio +3 more |
2019-04-16 |
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Vertical field-effect-transistors having a silicon oxide layer with controlled thickness |
Chi-Chun Liu, Sanjay C. Mehta, Luciana Meli, Muthumanickam Sankarapandian, Kristin Schmidt |
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Methods of forming block polymers for directed self-assembly |
Anindarupa Chunder, Daniel P. Sanders |
2018-11-06 |
$3,429,000 |
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Additives for orientation control of block copolymers |
Joy Cheng, Anindarupa Chunder, Daniel P. Sanders |
2018-09-04 |
$2,923,000 |
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Fluoro-alcohol additives for orientation control of block copolymers |
Joy Cheng, Anindarupa Chunder |
2018-08-07 |
$1,950,000 |
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Thin film self assembly of topcoat-free silicon-containing diblock copolymers |
Noel Arellano, Teddie Peregrino Magbitang, Daniel P. Sanders, Kristin Schmidt |
2018-05-29 |
$2,015,000 |
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Block copolymers for directed self-assembly applications |
Noel Arellano, Joy Cheng, Teddie Peregrino Magbitang, Jed W. Pitera, Daniel P. Sanders +2 more |
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Hydrogel compositions for direct-write printing applications |
Amanda C. Engler, Wei Han, Hareem T. Maune, Alshakim Nelson, Rudy J. Wojtecki +1 more |
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High-chi block copolymers for interconnect structures by directed self-assembly |
Chi-Chun Liu, Teddie Peregrino Magbitang, Daniel P. Sanders, Kristin Schmidt |
2017-09-19 |
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