Formulations for advanced polishing pads

Assignee

• Applied Materials

Inventors

• Sivapackia Ganapathiappan (167 patents)
• Ankit Vora (39 patents)
• Boyi Fu (27 patents)
• Venkat Hariharan (5 patents)
• Mayu YAMAMURA (24 patents)
• Mario CORNEJO (10 patents)
• Igor ABRAMSON (3 patents)
• Mo YANG (5 patents)
• Daniel Redfield (49 patents)
• Rajeev Bajaj (112 patents)
• Nag B. Patibandla (112 patents)

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