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System and method for testing pattern sensitive algorithms for semiconductor design |
David L. DeMaris, Timothy G. Dunham, William C. Leipold, Daniel N. Maynard, Shi Zhong |
2012-06-12 |
| 8174681 |
Calibration of lithographic process models |
Ioana Graur, Geng Han, Scott M. Mansfield |
2012-05-08 |
| 8161421 |
Calibration and verification structures for use in optical proximity correction |
Ramya Viswanathan, Amr Y. Abdo, Henning Haffner, Oseo Park |
2012-04-17 |
| 7975246 |
MEEF reduction by elongation of square shapes |
Derren N. Dunn, Michael M. Crouse, Henning Haffner |
2011-07-05 |
| 7808257 |
Ionization test for electrical verification |
Christopher Cline, Edward J. Yarmchuk, Vincent A. Arena, Donald A. Merte, Thomas Picunko +4 more |
2010-10-05 |
| 7685544 |
Testing pattern sensitive algorithms for semiconductor design |
David L. DeMaris, Timothy G. Dunham, William C. Leipold, Daniel N. Maynard, Shi Zhong |
2010-03-23 |
| 7673279 |
Iterative method for refining integrated circuit layout using compass optical proximity correction (OPC) |
— |
2010-03-02 |
| 7360199 |
Iterative method for refining integrated circuit layout using compass optical proximity correction (OPC) |
— |
2008-04-15 |
| 7353472 |
System and method for testing pattern sensitive algorithms for semiconductor design |
David L. DeMaris, Timothy G. Dunham, William C. Leipold, Daniel N. Maynard, Shi Zhong |
2008-04-01 |
| 7187179 |
Wiring test structures for determining open and short circuits in semiconductor devices |
Toshiaki Yanagisawa |
2007-03-06 |
| 6800864 |
Method and structure for reducing effects of noise and resonance associated with an e-beam lithography tool |
— |
2004-10-05 |
| 6785615 |
Method and structure for detection of electromechanical problems using variance statistics in an E-beam lithography device |
— |
2004-08-31 |
| 6781141 |
Method and structure for detection and measurement of electrical and mechanical resonance associated with an E-beam lithography tool |
— |
2004-08-24 |
| 6400128 |
Thermal modulation system and method for locating a circuit defect |
Daniel Guidotti, Arnold Halperin, Arthur R. Zingher |
2002-06-04 |
| 6242923 |
Method for detecting power plane-to-power plane shorts and I/O net-to power plane shorts in modules and printed circuit boards |
Edward J. Yarmchuk, Arnold Halperin |
2001-06-05 |
| 6236196 |
Thermal modulation system and method for locating a circuit defect such as a short or incipient open independent of a circuit geometry |
Daniel Guidotti, Arnold Halperin, Arthur R. Zingher |
2001-05-22 |
| 6141093 |
Method and apparatus for locating power plane shorts using polarized light microscopy |
Bernell E. Argyle, Arnold Halperin, Edward J. Yarmchuk |
2000-10-31 |
| 6005966 |
Method and apparatus for multi-stream detection of high density metalization layers of multilayer structures having low contrast |
— |
1999-12-21 |
| 5936408 |
Simplified contactless test of MCM thin film I/O nets using a plasma |
— |
1999-08-10 |
| 5821759 |
Method and apparatus for detecting shorts in a multi-layer electronic package |
Edward J. Yarmchuk, Yuet-Ying Yu |
1998-10-13 |
| 5818239 |
Simplified contactless test of MCM thin film I/O nets using a plasma |
— |
1998-10-06 |
| 5448650 |
Thin-film latent open optical detection with template-based feature extraction |
Kamalesh S. Desai, James Wood |
1995-09-05 |