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Method and apparatus for angular-resolved spectroscopic lithography characterization |
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Method and apparatus for angular-resolved spectroscopic lithography characterization |
Arie Jeffrey Den Boef, Arno Jan Bleeker, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more |
2021-03-23 |
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Inspection method, lithographic apparatus, mask and substrate |
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2019-08-27 |
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Method and apparatus for angular-resolved spectroscopic lithography characterization |
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2019-03-26 |
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Lithographic apparatus and a method of operating the apparatus |
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2019-01-08 |
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Inspection method, lithographic apparatus, mask and substrate |
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2018-06-19 |
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2018-04-10 |
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2015-04-28 |
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Lithographic apparatus and a method of operating the apparatus |
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2014-09-02 |
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Lithographic apparatus and device manufacturing method |
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2014-07-15 |
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Method and apparatus for angular-resolved spectroscopic lithography characterization |
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2014-06-24 |
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Method and apparatus for angular-resolved spectroscopic lithography characterization |
Arie Jeffrey Den Boef, Arno Jan Bleeker, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more |
2013-10-08 |
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Method of inspecting a substrate and method of preparing a substrate for lithography |
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2013-05-07 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Richard Moerman, Cédric Désiré Grouwstra |
2012-12-11 |
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Method and apparatus for angular-resolved spectroscopic lithography characterization |
Arie Jeffrey Den Boef, Arno Jan Bleeker, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more |
2011-11-08 |
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Method and apparatus for angular-resolved spectroscopic lithography characterization |
Arie Jeffrey Den Boef, Arno Jan Bleeker, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more |
2010-09-07 |