| 10175585 |
Lithographic apparatus and a method of operating the apparatus |
Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +7 more |
2019-01-08 |
| 9599908 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten +4 more |
2017-03-21 |
| 9158206 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten +4 more |
2015-10-13 |
| 9019466 |
Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system |
Martinus Hendrikus Antonius Leenders, Youri Johannes Laurentius Maria Van Dommelen, Hans Jansen, Anthonius Martinus Cornelis Petrus De Jong, Jan Willem Cromwijk +1 more |
2015-04-28 |
| 8823918 |
Lithographic apparatus and a method of operating the apparatus |
Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +7 more |
2014-09-02 |
| 7916269 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten +4 more |
2011-03-29 |