| 9599908 |
Lithographic apparatus and contamination removal or prevention method |
Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2017-03-21 |
| 9289802 |
Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus |
Hans Jansen, Josephus Cornelius Johannes Antonius Vugts, Jacques Cor Johan Van Der Donck, Teunis Cornelis van den Dool, Gerrit Oosterhuis |
2016-03-22 |
| 9158206 |
Lithographic apparatus and contamination removal or prevention method |
Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2015-10-13 |
| 9019466 |
Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system |
Martinus Hendrikus Antonius Leenders, Youri Johannes Laurentius Maria Van Dommelen, Hans Jansen, Robert Douglas Watso, Jan Willem Cromwijk +1 more |
2015-04-28 |
| 9013672 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2015-04-21 |
| 8947629 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2015-02-03 |
| 8823918 |
Lithographic apparatus and a method of operating the apparatus |
Robert Douglas Watso, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Martinus Hendrikus Antonius Leenders +7 more |
2014-09-02 |
| 8339572 |
Lithographic apparatus and device manufacturing method |
— |
2012-12-25 |
| 8011377 |
Cleaning device and a lithographic apparatus cleaning method |
Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-09-06 |
| 7916269 |
Lithographic apparatus and contamination removal or prevention method |
Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2011-03-29 |
| 7900641 |
Cleaning device and a lithographic apparatus cleaning method |
Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-03-08 |
| 7866330 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Bauke Jansen, Raymond Gerardus Marius Beeren, Kornelis Tijmen Hoekerd |
2011-01-11 |
| 7841352 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Bauke Jansen, Raymond Gerardus Marius Beeren, Kornelis Tijmen Hoekerd |
2010-11-30 |