| 9599908 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten +4 more |
2017-03-21 |
| 9158206 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten +4 more |
2015-10-13 |
| 9019466 |
Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system |
Martinus Hendrikus Antonius Leenders, Youri Johannes Laurentius Maria Van Dommelen, Hans Jansen, Robert Douglas Watso, Anthonius Martinus Cornelis Petrus De Jong +1 more |
2015-04-28 |
| 8836915 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Pieter Mulder, Jimmy Matheus Wilhelmus Van De Winkel, Marjan Leonardus Catharina Hoofman, Ferdinand Hendriks |
2014-09-16 |
| 8711326 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ronald Van Der Ham, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Richard Moerman, Michel Riepen +8 more |
2014-04-29 |
| 8405817 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Marco Koert Stavenga, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +16 more |
2013-03-26 |
| 7916269 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Peter Franciscus Wanten +4 more |
2011-03-29 |
| 6632081 |
Assembly of a cooling unit and a mold |
— |
2003-10-14 |
