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Lithographic apparatus and device manufacturing method |
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Lithographic apparatus and a method of operating the apparatus |
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2024-08-27 |
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Lithographic apparatus and device manufacturing method |
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2023-10-17 |
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Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk, Sergei Shulepov |
2022-12-27 |
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Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens |
2021-12-28 |
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Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen, Michel Riepen +3 more |
2021-11-30 |
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Fluid handling structure, lithographic apparatus and device manufacturing method |
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2021-10-12 |
| 10866501 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk, Sergei Shulepov |
2020-12-15 |
| 10802410 |
Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid |
Marcel Beckers, Stefan Philip Christiaan Belfroid, Ferdy Migchelbrink, Sergei Shulepov |
2020-10-13 |
| 10768536 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens |
2020-09-08 |
| 10705439 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2020-07-07 |
| 10599054 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2020-03-24 |
| 10495984 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2019-12-03 |
| 10331047 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2019-06-25 |
| 10209629 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2019-02-19 |
| 10191396 |
Lithographic apparatus, object positioning system and device manufacturing method |
Paul Corné Henri DE WIT, Stijn Willem Boere, Youssef Karel Maria De Vos, Peter Paul HEMPENIUS, Robertus Mathijs Gerardus Rijs +1 more |
2019-01-29 |
| 10126664 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens |
2018-11-13 |
| 10114299 |
Lithographic apparatus |
Günes NAKIBOGLU, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Sander Kerssemakers, Robertus Mathijs Gerardus Rijs +6 more |
2018-10-30 |
| 10018925 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2018-07-10 |
| 10018921 |
Lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Michel Riepen |
2018-07-10 |
| 9964865 |
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus |
Cédric Désiré Grouwstra, Norbertus Josephus Martinus Van Den Nieuwelaar, Dirk De Vries, Hua Li, Marinus Jochemsen |
2018-05-08 |
| 9946172 |
System for positioning an object in lithography |
Peter Paul HEMPENIUS, Martijn Houben, Robertus Mathijs Gerardus Rijs, Paul Corné Henri DE WIT, Stijn Willem Boere +2 more |
2018-04-17 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2018-02-27 |
| 9857695 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2018-01-02 |
| 9766556 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Sergei Shulepov |
2017-09-19 |
