| 9746782 |
Lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Michel Riepen |
2017-08-29 |
| 9746788 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2017-08-29 |
| 9618853 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens |
2017-04-11 |
| 9606429 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2017-03-28 |
| 9507278 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2016-11-29 |
| 9488923 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2016-11-08 |
| 9477158 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Stefan Philip Christiaan Belfroid, Ferdy Migchelbrink, Sergei Shulepov |
2016-10-25 |
| 9448494 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Sergei Shulepov |
2016-09-20 |
| 9429853 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2016-08-30 |
| 9383654 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Danny Maria Hubertus Philips, Michel Riepen, Clemens Johannes Gerardus Van Den Dungen +2 more |
2016-07-05 |
| 9329491 |
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus |
Cédric Désiré Grouwstra, Norbertus Josephus Martinus Van Den Nieuwelaar, Dirk De Vries, Hua Li, Marinus Jochemsen |
2016-05-03 |
| 9268236 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more |
2016-02-23 |
| 9235113 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk, Sergei Shulepov |
2016-01-12 |
| 9229334 |
Lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Michel Riepen |
2016-01-05 |
| 9213246 |
Fluid extraction system, lithographic apparatus and device manufacturing method |
Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Michel Riepen, Martinus Wilhelmus Van Den Heuvel, Paul Petrus Joannes Berkvens +3 more |
2015-12-15 |
| 9176393 |
Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen, Michel Riepen +3 more |
2015-11-03 |
| 9140996 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens |
2015-09-22 |
| 9097992 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2015-08-04 |
| 9099501 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Sergei Shulepov |
2015-08-04 |
| 8988651 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2015-03-24 |
| 8976334 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2015-03-10 |
| 8953142 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2015-02-10 |
| 8804094 |
Lithographic apparatus and a device manufacturing method |
Michel Riepen |
2014-08-12 |
| 8786823 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens |
2014-07-22 |
| 8755028 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2014-06-17 |
