| 12429778 |
Fluid handling system, method and lithographic apparatus |
Cornelius Maria Rops, Giovanni Luca Gattobigio, Christianus Wilhelmus Johannes Berendsen |
2025-09-30 |
| 12287580 |
Fluid handling system, method and lithographic apparatus |
Cornelius Maria Rops, Christianus Wilhelmus Johannes Berendsen, Dagmar Antoinette Wismeijer |
2025-04-29 |
| 12287570 |
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus |
Stef Marten Johan Janssens, Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Theodorus Johannes Antonius Renckens +4 more |
2025-04-29 |
| 12242200 |
Lithography apparatus and a method of manufacturing a device |
Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet, Jorge Alberto Vieyra Salas +3 more |
2025-03-04 |
| 12072636 |
Fluid handling system and lithographic apparatus |
Theodorus Wilhelmus Polet, Koen Steffens, Ronald Van Der Ham, Gerben Pieterse, Francis Fahrni |
2024-08-27 |
| 12072635 |
Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Michel Riepen +3 more |
2024-08-27 |
| 11774857 |
Lithography apparatus and device manufacturing method |
Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet, Jorge Alberto Vieyra Salas +3 more |
2023-10-03 |
| 11720032 |
Process tool and an inspection method |
Raphael Nico Johan Stegen, Christianus Wilhelmus Johannes Berendsen, Theodorus Wilhelmus Polet, Giovanni Luca Gattobigio |
2023-08-08 |
| 11614689 |
Fluid handling structure and lithographic apparatus |
Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more |
2023-03-28 |
| 11372336 |
Lithography apparatus and device manufacturing method |
Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet, Jorge Alberto Vieyra Salas +3 more |
2022-06-28 |
| 11231653 |
Fluid handling structure and lithographic apparatus |
Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more |
2022-01-25 |
| 11199771 |
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus |
Stef Marten Johan Janssens, Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Theodorus Johannes Antonius Renckens +4 more |
2021-12-14 |
| 11187991 |
Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Michel Riepen +3 more |
2021-11-30 |
| 11143969 |
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus |
Giovanni Luca Gattobigio, Nirupam Banerjee, Johan Franciscus Maria Beckers, Ronald Frank KOX, Theodorus Wilhelmus Polet +4 more |
2021-10-12 |
| 11048178 |
Lithographic apparatus with improved patterning performance |
Federico La Torre, Laurentius Johannes Adrianus Van Bokhoven, José Nilton Fonseca, Jr., Gerben Pieterse, Frank Johannes Jacobus Van Boxtel |
2021-06-29 |
| 10969695 |
Fluid handling structure and lithographic apparatus |
Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more |
2021-04-06 |
| 10859919 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Walter Theodorus Matheus STALS, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo +3 more |
2020-12-08 |
| 10725390 |
Inspection substrate and an inspection method |
Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Floor Lodewijk Keukens +8 more |
2020-07-28 |
| 10649341 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2020-05-12 |
| 10551748 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Walter Theodorus Matheus STALS, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo +3 more |
2020-02-04 |
| 10534270 |
Lithography apparatus, a method of manufacturing a device and a control program |
Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more |
2020-01-14 |
| 10416571 |
Fluid handling structure and lithographic apparatus |
Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more |
2019-09-17 |
| 10261422 |
Lithography apparatus and method of manufacturing a device |
Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more |
2019-04-16 |
| 10216100 |
Inspection substrate and an inspection method |
Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Floor Lodewijk Keukens +8 more |
2019-02-26 |
| 10095129 |
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus |
Giovanni Luca Gattobigio, Ruud Olieslagers, Gerben Pieterse, Cornelius Maria Rops, Laurentius Johannes Adrianus Van Bokhoven |
2018-10-09 |