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Calibration system for an extreme ultraviolet light source |
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Lithographic apparatus and device manufacturing method |
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Prolonging optical element lifetime in an EUV lithography system |
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Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk |
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Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens |
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Lithographic apparatus and device manufacturing method |
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Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more |
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| 11003098 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +19 more |
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Pellicle attachment apparatus |
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| 10788763 |
Lithographic apparatus |
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Support apparatus, a lithographic apparatus and a device manufacturing method |
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Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens |
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| 10712656 |
Method for manufacturing a membrane assembly |
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Lithographic apparatus and device manufacturing method |
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| 10684554 |
Lithographic apparatus and device manufacturing method |
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| 10656536 |
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method |
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2020-05-19 |
| 10649349 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface |
Sjoerd Nicolaas Lambertus Donders, Harry Sewell, Louis John Markoya, Marcus Martinus Petrus Adrianus Vermeulen, Diane Elaine Markoya |
2020-05-12 |
| 10649341 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more |
2020-05-12 |
| 10558129 |
Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more |
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| 10539886 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +19 more |
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| 10514615 |
Support apparatus, lithographic apparatus and device manufacturing method |
Andre Bernardus Jeunink, Robbert Arij Jeroen De Jong, Evelyn Wallis Pacitti, Thomas POIESZ, Frank Pieter Albert Van Den Berkmortel |
2019-12-24 |
| 10488759 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
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| 10451973 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2019-10-22 |