| 10788763 |
Lithographic apparatus |
Jan Steven Christiaan Westerlaken, Ruud Hendrikus Martinus Johannes Bloks, Thibault Simon Mathieu Laurent, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster +4 more |
2020-09-29 |
| 9977351 |
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature |
Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Christopher Charles Ward +5 more |
2018-05-22 |
| 9857694 |
Estimating deformation of a patterning device and/or a change in its position |
Bearrach Moest, Johannes Onvlee, Adrianus Martinus Van Der Wielen, Christopher Charles Ward |
2018-01-02 |
| 9766557 |
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature |
Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Christopher Charles Ward +5 more |
2017-09-19 |
| 9632433 |
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature |
Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Christopher Charles Ward +5 more |
2017-04-25 |
| 9632434 |
Reticle cooling system in a lithographic apparatus |
Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Christopher Charles Ward +6 more |
2017-04-25 |
| 9513568 |
Lithographic apparatus |
Jan Steven Christiaan Westerlaken, Ruud Hendrikus Martinus Johannes Bloks, Thibault Simon Mathieu Laurent, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster +4 more |
2016-12-06 |