Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326670 | Lithographic apparatus, metrology system, and intensity imbalance measurement for error correction | Roxana Rezvani Naraghi | 2025-06-10 |
| 9977351 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2018-05-22 |
| 9891540 | Measuring method, measurement apparatus, lithographic apparatus and device manufacturing method | Franciscus Godefridus Casper Bijnen | 2018-02-13 |
| 9766557 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2017-09-19 |
| 9632433 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +5 more | 2017-04-25 |
| 9632434 | Reticle cooling system in a lithographic apparatus | Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro, Christopher Charles Ward +6 more | 2017-04-25 |
| 8730476 | Tunable wavelength illumination system | Arie Jeffrey Den Boef, Harry Sewell, Keith Andersen, Sanjeev Singh | 2014-05-20 |
| 8508736 | Tunable wavelength illumination system | Arie Jeffrey Den Boef, Harry Sewell, Keith William ANDRESEN, Sanjeev Singh | 2013-08-13 |
| RE42650 | Fluid gauge proximity sensor and method of operating same using a modulated fluid flow | Daniel N. Galburt, Joseph H. Lyons | 2011-08-30 |
| 7134321 | Fluid gauge proximity sensor and method of operating same using a modulated fluid flow | Daniel N. Galburt, Joseph H. Lyons | 2006-11-14 |
| 7021121 | Gas gauge proximity sensor with a modulated gas flow | Daniel N. Galburt, Joseph H. Lyons | 2006-04-04 |
| 5187543 | Differential displacement measuring interferometer | — | 1993-02-16 |
| 5028137 | Angular displacement measuring interferometer | Gary E. Sommargren | 1991-07-02 |