Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422478 | Control of reticle placement for defectivity optimization | Andrew Judge, Aage Bendiksen | 2022-08-23 |
| 10139725 | Lithographic apparatus | James Wiley, Juan Diego Arias Espinoza, Derk Servatius Gertruda Brouns, Laurentius Cornelius De Winter, Florian Didier Albin Dhalluin +1 more | 2018-11-27 |
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi +8 more | 2017-03-28 |