| 12124176 |
Inspection apparatus |
Pawel Safinowski |
2024-10-22 |
| 12066758 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Pradeep K. Govil, Paul Janssen +9 more |
2024-08-20 |
| 11906907 |
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2024-02-20 |
| 11762281 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Paul Janssen +17 more |
2023-09-19 |
| 11635681 |
Mask assembly and associated methods |
Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Matthias Kruizinga, Arnoud Willem Notenboom +3 more |
2023-04-25 |
| 11474438 |
Inspection apparatus |
Pawel Safinowski |
2022-10-18 |
| 11347142 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Pradeep K. Govil, Paul Janssen +9 more |
2022-05-31 |
| 11086213 |
Mask assembly and associated methods |
Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Matthias Kruizinga, Amoud Willem Notenboom +3 more |
2021-08-10 |
| 11036128 |
Membrane assembly |
Paul Janssen, Mohammad Reza KAMALI, Mária Péter, Willem Joan Van Der Zande, Pieter-Jan Van Zwol +2 more |
2021-06-15 |
| 11029595 |
Mask assembly and associated methods |
Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Matthias Kruizinga, Arnoud Willem Notenboom +3 more |
2021-06-08 |
| 11009803 |
Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Marc Bruijn +17 more |
2021-05-18 |
| 11003098 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Marc Bruijn, Jeroen Dekkers +19 more |
2021-05-11 |
| 10983431 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Pradeep K. Govil, Paul Janssen +9 more |
2021-04-20 |
| 10969701 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Marc Bruijn, Jeroen Dekkers +19 more |
2021-04-06 |
| 10908496 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Paul Janssen +17 more |
2021-02-02 |
| 10571800 |
Mask assembly and associated methods |
Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Matthias Kruizinga, Arnoud Willem Notenboom +3 more |
2020-02-25 |
| 10558129 |
Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Marc Bruijn +17 more |
2020-02-11 |
| 10539886 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Marc Bruijn, Jeroen Dekkers +19 more |
2020-01-21 |
| 10466585 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Pradeep K. Govil, Paul Janssen +9 more |
2019-11-05 |
| 10139725 |
Lithographic apparatus |
James Wiley, Juan Diego Arias Espinoza, Laurentius Cornelius De Winter, Florian Didier Albin Dhalluin, Pedro Julian Rizo Diago +1 more |
2018-11-27 |