Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12066758 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Paul Janssen +9 more | 2024-08-20 |
| 11347142 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Paul Janssen +9 more | 2022-05-31 |
| 10983431 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Paul Janssen +9 more | 2021-04-20 |
| 10466585 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Paul Janssen +9 more | 2019-11-05 |
| RE46099 | Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit | Andrew Guzman | 2016-08-09 |
| 9136751 | Linear motor magnetic shield apparatus for lithographic systems | Kalyan Kumar MANKALA, Roberto B. Wiener, Andrew Michael Nelson | 2015-09-15 |
| 9130443 | Linear motor magnetic shield apparatus | Kalyan Kumar MANKALA, Roberto B. Wiener, Andrew Michael Nelson | 2015-09-08 |
| RE45511 | Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit | Andrew Guzman | 2015-05-12 |
| 8982317 | Cooling of actuator coils | Roberto B. Wiener, Michael Emerson Brown | 2015-03-17 |
| 8879045 | Method utilizing an electrooptic modulator | James Tsacoyeanes | 2014-11-04 |
| 7876420 | System and method utilizing an electrooptic modulator | James Tsacoyeanes | 2011-01-25 |
| 7525718 | Spatial light modulator using an integrated circuit actuator and method of making and using same | James Tsacoyeanes | 2009-04-28 |
| 7385750 | Spatial light modulator using an integrated circuit actuator | James Tsacoyeanes | 2008-06-10 |
| 7372614 | Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit | Andrew Guzman | 2008-05-13 |
| 7265815 | System and method utilizing an illumination beam adjusting system | — | 2007-09-04 |
| 7224504 | Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use | Andrew Guzman | 2007-05-29 |
| 7142353 | System and method utilizing an electrooptic modulator | James Tsacoyeanes | 2006-11-28 |
| 6922230 | DUV scanner linewidth control by mask error factor compensation | James Tsacoyeanes | 2005-07-26 |
| 6573975 | DUV scanner linewidth control by mask error factor compensation | James Tsacoyeanes | 2003-06-03 |
| 6556281 | Flexible piezoelectric chuck and method of using the same | Jorge Ivaldi | 2003-04-29 |
| 6509952 | Method and system for selective linewidth optimization during a lithographic process | James Tsacoyeanes | 2003-01-21 |
| 6097474 | Dynamically adjustable high resolution adjustable slit | Andrew W. McCullough, Daniel N. Galburt, David Callan | 2000-08-01 |
| 6013401 | Method of controlling illumination field to reduce line width variation | Andrew W. McCullough, Daniel N. Galburt, David Callan | 2000-01-11 |
| 5895737 | Method for adjusting an illumination field based on selected reticle feature | Andrew W. McCullough | 1999-04-20 |