Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11971606 | Adjustable alignment mount | Joseph Flaherty, Steven R. Gillmer, Kevin Edward Sullivan, Steven J. Augst | 2024-04-30 |
| RE46099 | Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit | Pradeep K. Govil | 2016-08-09 |
| RE45511 | Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit | Pradeep K. Govil | 2015-05-12 |
| 7372614 | Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit | Pradeep K. Govil | 2008-05-13 |
| 7224504 | Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use | Pradeep K. Govil | 2007-05-29 |
| 6398373 | Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems | Carlo La Fiandra, Ronald P. Sidor, Jorge Ivaldi, Michael L. Nelson | 2002-06-04 |