Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7339653 | System for a pellicle frame with heightened bonding surfaces | Joseph Laganza | 2008-03-04 |
| 7249925 | System and method for reticle protection and transport | Santiago del Puerto, Michael DeMarco, Glenn Friedman, James McClay | 2007-07-31 |
| 7173689 | Method and system for a pellicle frame with heightened bonding surfaces | Joseph Laganza | 2007-02-06 |
| 6991416 | System and method for reticle protection and transport | Santiago del Puerto, Michael DeMarco, Glenn Friedman, James McClay | 2006-01-31 |
| 6977716 | Catadioptric lithography system and method with reticle stage orthogonal to wafer stage | Harry Sewell, John Shamaly | 2005-12-20 |
| 6847434 | Method and apparatus for a pellicle frame with porous filtering inserts | Joseph Laganza, Florence Luo | 2005-01-25 |
| 6822731 | Method and apparatus for a pellicle frame with heightened bonding surfaces | Joseph Laganza | 2004-11-23 |
| 6757110 | Catadioptric lithography system and method with reticle stage orthogonal to wafer stage | Harry Sewell, John Shamaly | 2004-06-29 |
| 6619903 | System and method for reticle protection and transport | Glenn Friedman, Michael DeMarco, James McClay | 2003-09-16 |
| 6559922 | Method and apparatus for a non-contact scavenging seal | Eric Hansell, Jose V. Herrera, Richard L. Huse, Stephen G. Krehley, Thomas P. Shamaly | 2003-05-06 |
| 6556281 | Flexible piezoelectric chuck and method of using the same | Pradeep K. Govil | 2003-04-29 |
| 6507390 | Method and apparatus for a reticle with purged pellicle-to-reticle gap | — | 2003-01-14 |
| 6411426 | Apparatus, system, and method for active compensation of aberrations in an optical system | Michael F. Meehan, David Taub | 2002-06-25 |
| 6398373 | Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems | Andrew Guzman, Carlo La Fiandra, Ronald P. Sidor, Michael L. Nelson | 2002-06-04 |