Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6398373 | Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems | Andrew Guzman, Ronald P. Sidor, Jorge Ivaldi, Michael L. Nelson | 2002-06-04 |
| 6181459 | Deformable mirror with removable actuator using shaped-memory alloys | — | 2001-01-30 |
| 6137622 | Kinematic actuator deformable mirror | — | 2000-10-24 |
| 5745278 | Innovative deformable mirror actuator configuration | — | 1998-04-28 |
| 5535043 | Replaceable actuator assembly for optical mirror with kinematic mount | Gon-Yen Shen | 1996-07-09 |
| 5411617 | Method for use in fabricating and/or testing a thin mirror | — | 1995-05-02 |
| 4610020 | X-ray mask ring and apparatus for making same | — | 1986-09-02 |
| 4539695 | X-Ray lithography system | — | 1985-09-03 |
| 4534047 | Mask ring assembly for X-ray lithography | Warren Deschenaux, Gregory P. Hughes, Justin Kreuzer | 1985-08-06 |
| 4516062 | Actuator | Peter B. Mumola | 1985-05-07 |
| 4453106 | Compression base lamp | — | 1984-06-05 |
| 4425038 | Technique to modify wafer geometry | Burke E. Nelson | 1984-01-10 |
| 4390929 | Precise lamp positioner | — | 1983-06-28 |
| 4378989 | Apparatus for laser assisted machining of glass materials | Burke E. Nelson, Douglas F. Baker | 1983-04-05 |