Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646779 | Strain-isolated stage mirror | Flemming Tinker, Steven R. Patterson | 2003-11-11 |
| 6074947 | Process for improving uniform thickness of semiconductor substrates using plasma assisted chemical etching | — | 2000-06-13 |
| 5543919 | Apparatus and method for performing high spatial resolution thin film layer thickness metrology | — | 1996-08-06 |
| 5474647 | Wafer flow architecture for production wafer processing | Sherman K. Poultney, Joseph P. Prusak, George J. Gardopee, Thomas J. McHugh | 1995-12-12 |
| 5419803 | Method of planarizing microstructures | — | 1995-05-30 |
| 5365031 | Apparatus and method for shielding a workpiece holding mechanism from depreciative effects during workpiece processing | — | 1994-11-15 |
| 5337150 | Apparatus and method for performing thin film layer thickness metrology using a correlation reflectometer | — | 1994-08-09 |
| 5292400 | Method and apparatus for producing variable spatial frequency control in plasma assisted chemical etching | — | 1994-03-08 |
| 5229872 | Exposure device including an electrically aligned electronic mask for micropatterning | — | 1993-07-20 |
| 4516062 | Actuator | Carlo La Fiandra | 1985-05-07 |
| 4422046 | Axisymmetric spatial/temporal encoder | Paul R. Yoder, Jr., Raul E. Casas, William M. Grossman | 1983-12-20 |