Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7768653 | Method and system for wavefront measurements of an optical system | Azat Latypov, Yuli Vladimirsky | 2010-08-03 |
| 7602503 | Methods for measuring a wavefront of an optical system | — | 2009-10-13 |
| 7595931 | Grating for EUV lithographic system aberration measurement | — | 2009-09-29 |
| 7580559 | System and method for calibrating a spatial light modulator | Azat Latypov | 2009-08-25 |
| 7469058 | Method and system for a maskless lithography rasterization technique based on global optimization | Azat Latypov, Wenceslao A. Cebuhar | 2008-12-23 |
| 7268891 | Transmission shear grating in checkerboard configuration for EUV wavefront sensor | — | 2007-09-11 |
| 7158238 | System and method for calibrating a spatial light modulator array using shearing interferometry | Azat Latypov | 2007-01-02 |
| 7113255 | Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby | Haico Victor Kok | 2006-09-26 |
| 7102733 | System and method to compensate for static and dynamic misalignments and deformations in a maskless lithography tool | Azat Latypov, Christopher Mason, Arno Jan Bleeker | 2006-09-05 |
| 6965436 | System and method for calibrating a spatial light modulator array using shearing interferometry | Azat Latypov | 2005-11-15 |
| 6867846 | Tailored reflecting diffractor for EUV lithographic system aberration measurement | — | 2005-03-15 |
| 6847461 | System and method for calibrating a spatial light modulator array using shearing interferometry | Azat Latypov | 2005-01-25 |
| 5610102 | Method for co-registering semiconductor wafers undergoing work in one or more blind process modules | George J. Gardopee, Paul J. Clapis, Joseph P. Prusak | 1997-03-11 |
| 5563709 | Apparatus for measuring, thinning and flattening silicon structures | — | 1996-10-08 |
| 5474647 | Wafer flow architecture for production wafer processing | Peter B. Mumola, Joseph P. Prusak, George J. Gardopee, Thomas J. McHugh | 1995-12-12 |
| 5312510 | Apparatus for optimally scanning a two-dimensional surface of one or more objects | — | 1994-05-17 |
| 5282921 | Apparatus and method for optimally scanning a two-dimensional surface of one or more objects | — | 1994-02-01 |
| 4729658 | Very wide spectral coverage grating spectrometer | — | 1988-03-08 |
| 4724326 | Off-chip time-delayed integration area array Fraunhofer line discriminator | Hans G. Sippach, Joseph H. Oberheuser | 1988-02-09 |
| 4433245 | Fraunhofer line discriminator | — | 1984-02-21 |